Development of Non-Contact Electrically Inducued Microbubble Micron Distance Sensor

In this research, we proposed a novel non-contact distance sensor using electrically induced microbubble. The microbubble generated from sensor tip by applying the voltage pulse to the sensor. The microbubble expanded and reached the object at a certain time. A sudden change in the current flowing through the sensor occurred when microbubble reached the object. This distance sensing method was developed by building a relation between the current and the distance. In this paper, electrically induced microbubble generation mechanism, current characteristics of microbubble touching different material target, distance-current characteristics development and the improvement of distance measurement range was introduced.