Monolithic Mid-IR Methane Gas Sensor with Waveguide-Integrated Detector

P. Su, K. Stoll,Z. Han,D. Kita, P. Becla,H. Lin,S. Deckoff-Jones,K. Richardson, L. C. Kimerling,J. Hu,A. Agarwal

2021 IEEE Photonics Society Summer Topicals Meeting Series (SUM)（2021）

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摘要

We demonstrate a monolithic chalcogenide glass spiral waveguide sensor integrated with a PbTe photoconductor detector on-chip for mid-infrared absorption spectroscopic sensing. Current methane gas sensing limit of detection was experimentally measured as 1% by volume, but further optimization should maximize sensitivity to 330 ppmv.

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关键词

gas sensor,waveguide-integrated detector

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