Micro-electrode array and micro-hole array fabrication by combined micro-WEDM and EMM

A technology of microelectrode array and micro-hole array fabricated by combined micro-WEDM and EMM(Electrochemical micromachining) was successfully developed. Process of Micro-WEDM(wire electrical discharge grinding) technology for microelectrode array fabrication is assessed. 10x10 micro-electrode arrays are got, the width of squared section for each electrode is about 30 mu m, the high is about 600 mu m and the distance between neighborhood electrodes is about 70 mu m, and 10x10 square micro-hole arrays fabricated by these microelectrode arrays are got by micro-EDM, the diameter of each hole is about 50 mu m and the width is about 80 mu m. Working efficiency of using microelectrode array and single electrode to machine micro-hole array by Micro-EDM is compared, the former has higher efficiency. Then 10x10 micro-hole arrays are fabricated by 10x10 square micro-electrode array of 40 mu m high by EMM, the diameter of single hole is about 100 mu m and deep is 30 mu m. Affected by duplication error and repeated error of EMM, the micro-hole array show obvious circular. New technology of large scale microelectrode array and micro-hole array fabricated by combined micro-WEDM and EMM is proved to be feasible and high efficient.