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Kenny's group is researching fundamental issues and applications of micromechanical structures. These devices are usually fabricated from silicon wafers using integrated circuit fabrication tools. Using these techniques, the group builds sensitive accelerometers, infrared detectors, and force-sensing cantilevers. This research has many applications, including integrated packaging, inertial navigation, fundamental force measurements, experiments on bio-molecules, device cooling, bio-analytical instruments, and small robots. Because this research field is multidisciplinary in nature, work in this group is characterized by strong collaborations with other departments, as well as with local industry.
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Jintark Kim, Rakibul Islam,James M. L. Miller,Jianing Zhao,Gabrielle Vukasin, Ryan Kwon,Saurabh Saxena, Pavan K. Hanumolu,Thomas W. Kenny,Gaurav Bahl
2024 IEEE 37TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, MEMSpp.1059-1062, (2024)
Jintark Kim, Rakibul Islam,James M.L. Miller,Jianing Zhao,Gabrielle Vukasin, Ryan Kwon,Saurabh Saxena, Pavan K. Hanumolu,Thomas W. Kenny,Gaurav Bahl
2024 IEEE 37th International Conference on Micro Electro Mechanical Systems (MEMS)pp.1059-1062, (2024)
Physical review researchno. 1 (2022): L012029
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)pp.987-990, (2022)
2022 IEEE 35TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS CONFERENCE (MEMS)pp.507-510, (2022)
Journal of Microelectromechanical Systemsno. 2 (2021): 330-330
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